High-Precision Vacuum Chamber Processing for Nanoscale Etching
The Challenge: Rapid Demand & Fragmented Supply Chains
With the rapid acceleration of the electronics, semiconductor, and solar photovoltaic (PV) industries, the demand for specialized vacuum coating and etching equipment is surging. Due to strict constraints on equipment volume, coating area sizes, and differing coating mediums, extreme customization and precision are required for every batch.
A leading OEM of Nanoscale Etching Equipment (whose technology filled a critical gap in domestic manufacturing) required the rapid, high-volume production of thick-walled vacuum chamber components. Short-flow fabricators with limited machinery struggled to manage the multi-step complexities required to process thick 316L and 304 stainless steel plates to vacuum-grade standards.
The Openex "One-Stop" Manufacturing Solution
By leveraging our massive equipment cluster—which houses hundreds of imported heavy machines under a single 180-acre roof—Openex bypassed standard supply chain delays. Our production, technical, and sales departments collaborated to entirely eliminate traditional processing bottlenecks.
To ensure ultra-low outgassing in high-vacuum environments, the 40mm thick 316L plates (1100mm x 1500mm) required immaculate surface preparation. Openex executed proprietary wet/oil polishing to eliminate surface defects, followed by massive structural leveling to ensure absolute dimensional flatness.
Components in heavy 25mm to 40mm stainless profiles were cut out using our high-definition plasma tables, achieving fast, thermal-controlled, near-net shape cuts while minimizing the heat-affected zone (HAZ).
Finished geometries—including complex flange mounts, viewing ports, and optic component accessories—were completed on high-precision Vertical Machining Centers, followed by strict vacuum-grade cleaning protocols.
Production Component Gallery
Project Specifications & Metrics
| Project Feature | Parameter Limits & Execution details |
|---|---|
| Production Volumes | Initial batch of 60 Sets (delivered prior to end of May) + Contract expansion to 160 Sets. **Over 200 units successfully delivered historically. |
| Material & Dimensions | 316L Stainless Steel: 40mm x 1100mm x 1500mm. 304 Stainless Steel: 25mm to 40mm plate variations. |
| Capabilities Triggered | Plasma Cutting, Material Leveling, Wet/Oil Precision Grinding, CNC Vertical Milling, Custom Cleaning. |
The Outcome
By shifting high-mix, demanding fabrication processes to Openex's singular equipment cluster platform, the client received the initial batch of 60 highly-difficult nanoscale chamber components flawlessly and on schedule. Our efficiency added massive new momentum to domestic equipment fabrication, resulting in an immediate contract expansion of an additional 100 sets.